Invention Grant
- Patent Title: Raman spectroscopy using diffractive MEMS
- Patent Title (中): 使用衍射MEMS的拉曼光谱
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Application No.: US14629858Application Date: 2015-02-24
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Publication No.: US09194743B2Publication Date: 2015-11-24
- Inventor: David R. Day , Malcolm C. Smith , Peidong Wang
- Applicant: Thermo Scientific Portable Analytical Instruments Inc.
- Applicant Address: US MA Tewksbury
- Assignee: Thermo Scientific Portable Analytical Instruments Inc.
- Current Assignee: Thermo Scientific Portable Analytical Instruments Inc.
- Current Assignee Address: US MA Tewksbury
- Agent Ion C. Abraham
- Main IPC: G01J3/44
- IPC: G01J3/44 ; G01J3/32 ; G01J3/02 ; G01N21/65

Abstract:
A Raman spectrometer including a laser excitation source, edge filters, and detection optics that direct light into a spectrograph. A spectrograph containing a dispersive element and optics that directs various wavelengths of light onto a segmented diffractive MEMS light modulator array. The MEMS array, depending on actuation state, directs light either to or away from a single detector. Control electronics drive the MEMS light modulator for either sequential wavelength measurement or multiplexed wavelength measurement (Hadamard for example).
Public/Granted literature
- US20150168215A1 RAMAN SPECTROSCOPY USING DIFFRACTIVE MEMS Public/Granted day:2015-06-18
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