Invention Grant
- Patent Title: Use of contacts to create differential stresses on devices
- Patent Title (中): 使用触点在器件上产生差分应力
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Application No.: US13798643Application Date: 2013-03-13
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Publication No.: US09196528B2Publication Date: 2015-11-24
- Inventor: John J. Ellis-Monaghan , Jeffrey P. Gambino , Kirk D. Peterson , Jed H. Rankin , Robert R. Robison
- Applicant: International Business Machines Corporation
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent David Cain
- Main IPC: H01L21/8238
- IPC: H01L21/8238 ; H01L21/768 ; H01L27/092

Abstract:
Disclosed herein are various methods and structures using contacts to create differential stresses on devices in an integrated circuit (IC) chip. An IC chip is disclosed having a p-type field effect transistor (PFET) and an n-type field effect transistor (NFET), a PFET contact to a source/drain region of the PFET and an NFET contact to a source/drain region of the NFET. In a first embodiment, a silicon germanium (SiGe) layer is included only under the PFET contact, between the PFET contact and the source/drain region of the PFET. In a second embodiment, either the PFET contact extends into the source/drain region of the PFET or the NFET contact extends into the source/drain region of the NFET.
Public/Granted literature
- US20130200434A1 USE OF CONTACTS TO CREATE DIFFERENTIAL STRESSES ON DEVICES Public/Granted day:2013-08-08
Information query
IPC分类: