Invention Grant
- Patent Title: Methods of using a trench salicide routing layer
- Patent Title (中): 使用沟槽自对准路由层的方法
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Application No.: US13729843Application Date: 2012-12-28
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Publication No.: US09196548B2Publication Date: 2015-11-24
- Inventor: Mahbub Rashed , Srikanth Samavedam , David Doman , Navneet Jain , Subramani Kengeri , Suresh Venkatesan
- Applicant: Mahbub Rashed , Srikanth Samavedam , David Doman , Navneet Jain , Subramani Kengeri , Suresh Venkatesan
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ditthavong & Steiner, P.C.
- Main IPC: H01L21/84
- IPC: H01L21/84 ; H01L27/12 ; H01L21/8238 ; H01L27/092

Abstract:
Methodology enabling selectively connecting fin structures using a segmented trench salicide layer, and the resulting device are disclosed. Embodiments include: providing on a substrate at least one gate structure; providing first and second fin structures in a vertical direction intersecting with the at least one gate structure; and providing a first segment of a salicide layer, the first segment being formed along a horizontal direction and being connected with the second fin structure and separated from the first fin structure.
Public/Granted literature
- US20140183638A1 METHODS OF USING A TRENCH SALICIDE ROUTING LAYER Public/Granted day:2014-07-03
Information query
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