Invention Grant
- Patent Title: Integrated circuits with dual silicide contacts and methods for fabricating same
- Patent Title (中): 具有双硅化物触点的集成电路及其制造方法
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Application No.: US14043017Application Date: 2013-10-01
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Publication No.: US09196694B2Publication Date: 2015-11-24
- Inventor: Guillaume Bouche , Shao Ming Koh , Jeremy A. Wahl , Andy Wei
- Applicant: GLOBALFOUNDRIES, Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ingrassia Fisher & Lorenz, P.C.
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L29/417 ; H01L27/092

Abstract:
Integrated circuits with dual silicide contacts and methods for fabricating integrated circuits with dual silicide contacts are provided. In an embodiment, a method for fabricating an integrated circuit includes providing a semiconductor substrate having PFET areas and NFET areas. The method selectively forms first silicide contacts from a first metal in the PFET areas. Further, the method selectively forms second silicide contacts from a second metal in the NFET areas. The second metal is different from the first metal.
Public/Granted literature
- US20150091093A1 INTEGRATED CIRCUITS WITH DUAL SILICIDE CONTACTS AND METHODS FOR FABRICATING SAME Public/Granted day:2015-04-02
Information query
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