Invention Grant
US09197192B2 Electronic component including a surface acoustic wave element and a pillar member 有权
包括表面声波元件和柱构件的电子部件

Electronic component including a surface acoustic wave element and a pillar member
Abstract:
An electronic component includes a support layer that surrounds an element region on a principal surface of a piezoelectric substrate, when viewed in plan from a z-axis direction. A surface acoustic wave element is provided in the element region. A cover layer is provided on the support layer, and is opposed to the principal surface. A pillar member connects the principal surface and the cover layer in a space surrounded by the principal surface, the support layer, and the cover layer, and does not contact with the support layer.
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