Invention Grant
- Patent Title: Transferable probe tips
- Patent Title (中): 可转移探针尖端
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Application No.: US13101253Application Date: 2011-05-05
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Publication No.: US09200883B2Publication Date: 2015-12-01
- Inventor: Paul S. Andry , Bing Dang , Steven L. Wright
- Applicant: Paul S. Andry , Bing Dang , Steven L. Wright
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Ryan, Mason & Lewis, LLP
- Main IPC: G01N27/84
- IPC: G01N27/84 ; G01R33/12 ; G01R31/26 ; H01L21/66 ; H01L21/44 ; G01B5/28 ; G03F7/00 ; G01R1/073 ; G01R3/00 ; G01Q70/14 ; G01R1/067 ; G01Q70/16 ; G01Q40/02

Abstract:
Transferable probe tips including a metallic probe, a delamination layer covering a portion of the metallic probe, and a bonding alloy, wherein the bonding alloy contacts the metallic probe at a portion of the probe that is not covered by the delamination layer are provided herein. Also, techniques for creating a transferable probe tip are provided, including etching a handler substrate to form one or more via arrays, depositing a delamination layer in each via array, depositing one or more metals in each via array to form a probe tip structure, and depositing a bonding alloy on a portion of the probe tip structure that is not covered by the delamination layer. Additionally, techniques for transferring transferable probe tips are provided, including removing a handler substrate from a probe tip structure, and transferring the probe tip structure via flip-chip joining the probe tip structure to a target probe head substrate.
Public/Granted literature
- US20120279287A1 Transferable Probe Tips Public/Granted day:2012-11-08
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