发明授权
US09202493B1 Method of making an ultra-sharp tip mode converter for a HAMR head 有权
制造用于HAMR头的超锋利尖端模式转换器的方法

Method of making an ultra-sharp tip mode converter for a HAMR head
摘要:
A mode converter for use in a Heat-assisted magnetic recording (HAMR) read head to couple or bend light (e.g., from an external laser diode) into a tapered waveguide, and subsequently, to a near field transducer is provided. The mode converter may have an ultra-sharp tip, e.g., less than 200 nm to achieve a desired optical output. Manufacturing such a mode converter involves a two-pattern transform process, where overlay control (using a first edge, such as a right edge, as a reference layer relative to which positioning of a second edge, such as a left edge, is measured) allows for aligning of the right and left edges of a tip portion of the mode converter to ultimately create the ultra-sharp tip.
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