发明授权
US09206500B2 Method and apparatus for surface processing of a substrate using an energetic particle beam
有权
使用能量粒子束对衬底进行表面处理的方法和装置
- 专利标题： Method and apparatus for surface processing of a substrate using an energetic particle beam
- 专利标题（中）： 使用能量粒子束对衬底进行表面处理的方法和装置
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申请号： US12212844申请日： 2008-09-18
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公开(公告)号： US09206500B2公开(公告)日： 2015-12-08
- 发明人: Boris Druz , Roger P. Fremgen, Jr. , Alan V. Hayes , Viktor Kanarov , Robert Krause , Ira Reiss , Piero Sferlazzo
- 申请人： Boris Druz , Roger P. Fremgen, Jr. , Alan V. Hayes , Viktor Kanarov , Robert Krause , Ira Reiss , Piero Sferlazzo
- 代理机构： Wood, Herron & Evans, LLP
- 主分类号： C23C14/04
- IPC分类号： C23C14/04 ; C23C14/22 ; H01J37/20 ; H01J37/302 ; H01J37/317
摘要：
Method and apparatus for processing a substrate with an energetic particle beam. Features on the substrate are oriented relative to the energetic particle beam and the substrate is scanned through the energetic particle beam. The substrate is periodically indexed about its azimuthal axis of symmetry, while shielded from exposure to the energetic particle beam, to reorient the features relative to the major dimension of the beam.
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