Invention Grant
US09207203B2 Two-dimensional electron gas sensor and methods for making and using the sensor
有权
二维电子气体传感器及制造和使用传感器的方法
- Patent Title: Two-dimensional electron gas sensor and methods for making and using the sensor
- Patent Title (中): 二维电子气体传感器及制造和使用传感器的方法
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Application No.: US14133373Application Date: 2013-12-18
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Publication No.: US09207203B2Publication Date: 2015-12-08
- Inventor: Roman Vitushinsky , Peter Offermans , Mercedes Crego Calama , Sywert Brongersma
- Applicant: Stichting IMEC Nederland
- Applicant Address: NL Eindhoven
- Assignee: Stichting IMEC Nederland
- Current Assignee: Stichting IMEC Nederland
- Current Assignee Address: NL Eindhoven
- Agency: Knobbe, Martens, Olson & Bear LLP
- Priority: EP12199289 20121221
- Main IPC: H01L29/778
- IPC: H01L29/778 ; G01N27/414 ; H01L29/66

Abstract:
The disclosed technology generally relates to a sensor and methods for making and using the same, and more particularly relates to a sensor configured to sense the presence of at least one fluidum. In one aspect, a sensor for sensing a fluidum in a space adjoining the sensor comprises a two-dimensional electron gas (2DEG) layer stack. The sensor additionally comprises a gate lying adjacent to at least part of the 2DEG layer stack and configured to electrostatically control the electron density of a two-dimensional electron gas (2DEG) in the 2DEG layer stack. The sensor further comprises a source electrode contacting the 2DEG layer stack for electrically contacting the 2DEG. The 2DEG layer stack of the sensor comprises a contact surface contacting the space and provided to contact molecules of the fluidum which is desired to be detected, and the gate of the sensor comprises a doped semiconductor bottom layer of the 2DEG layer stack in electrical contact with at least one gate electrode, where the doped semiconductor bottom layer being located at a side of the 2DEG layer stack opposing the contact surface.
Public/Granted literature
- US20140175516A1 TWO-DIMENSIONAL ELECTRON GAS SENSOR AND METHODS FOR MAKING AND USING THE SENSOR Public/Granted day:2014-06-26
Information query
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