Invention Grant
- Patent Title: Ion implantation apparatus and ion implantation method
- Patent Title (中): 离子注入装置和离子注入方法
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Application No.: US14077746Application Date: 2013-11-12
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Publication No.: US09208996B2Publication Date: 2015-12-08
- Inventor: Mitsukuni Tsukihara , Mitsuaki Kabasawa
- Applicant: SEN Corporation
- Applicant Address: JP Tokyo
- Assignee: Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Current Assignee: Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Michael Best & Friedrich LLP
- Priority: JP2012-249662 20121113
- Main IPC: H01J37/317
- IPC: H01J37/317 ; H01J37/302

Abstract:
An ion implantation apparatus includes a beamline device for transporting ions from an ion source to an implantation processing chamber. The implantation processing chamber includes a workpiece holder for mechanically scanning a workpiece with respect to a beam irradiation region. The beamline device may be operated under a first implantation setting configuration suitable for transport of a low energy/high current beam for high-dose implantation into the workpiece, or a second implantation setting configuration suitable for transport of a high energy/low current beam for low-dose implantation into the workpiece. A beam center trajectory being a reference in a beamline is equal from the ion source to the implantation processing chamber in the first implantation setting configuration and the second implantation setting configuration.
Public/Granted literature
- US20140134833A1 ION IMPLANTATION APPARATUS AND ION IMPLANTATION METHOD Public/Granted day:2014-05-15
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