Invention Grant
- Patent Title: Acoustic sensor
- Patent Title (中): 声传感器
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Application No.: US14243755Application Date: 2014-04-02
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Publication No.: US09210515B2Publication Date: 2015-12-08
- Inventor: Jaewoo Lee , Chang Han Je , Woo Seok Yang , Jong-Kee Kwon
- Applicant: Electronics and Telecommunications Research Institute
- Applicant Address: KR Daejeon
- Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Current Assignee Address: KR Daejeon
- Priority: KR10-2013-0129427 20131029
- Main IPC: H04R25/00
- IPC: H04R25/00 ; H04R19/00

Abstract:
Provided are an acoustic sensor and a method of manufacturing the same. The acoustic sensor includes a substrate including an acoustic chamber, a first hole, and a second hole, penetrating the substrate, a lower electrode pad extended onto a top surface of the substrate while covering a sidewall of the first hole, a diaphragm pad extended onto the top surface of the substrate while covering a sidewall of the second hole, a lower electrode provided on the acoustic chamber and connected to the lower electrode pad, and a diaphragm above the lower electrode while being separated from the lower electrode and connected to the diaphragm pad.
Public/Granted literature
- US20150117680A1 ACOUSTIC SENSOR Public/Granted day:2015-04-30
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