发明授权
- 专利标题: Acoustic sensor
- 专利标题(中): 声传感器
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申请号: US14243755申请日: 2014-04-02
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公开(公告)号: US09210515B2公开(公告)日: 2015-12-08
- 发明人: Jaewoo Lee , Chang Han Je , Woo Seok Yang , Jong-Kee Kwon
- 申请人: Electronics and Telecommunications Research Institute
- 申请人地址: KR Daejeon
- 专利权人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 当前专利权人: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- 当前专利权人地址: KR Daejeon
- 优先权: KR10-2013-0129427 20131029
- 主分类号: H04R25/00
- IPC分类号: H04R25/00 ; H04R19/00
摘要:
Provided are an acoustic sensor and a method of manufacturing the same. The acoustic sensor includes a substrate including an acoustic chamber, a first hole, and a second hole, penetrating the substrate, a lower electrode pad extended onto a top surface of the substrate while covering a sidewall of the first hole, a diaphragm pad extended onto the top surface of the substrate while covering a sidewall of the second hole, a lower electrode provided on the acoustic chamber and connected to the lower electrode pad, and a diaphragm above the lower electrode while being separated from the lower electrode and connected to the diaphragm pad.
公开/授权文献
- US20150117680A1 ACOUSTIC SENSOR 公开/授权日:2015-04-30
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