发明授权
US09211631B2 Grinding wheel truing tool and manufacturing method thereof, and truing apparatus, method for manufacturing grinding wheel and wafer edge grinding apparatus using the same
有权
砂轮修整工具及其制造方法，以及修整装置，用于制造砂轮的方法和使用其的晶片边缘磨削装置
- 专利标题： Grinding wheel truing tool and manufacturing method thereof, and truing apparatus, method for manufacturing grinding wheel and wafer edge grinding apparatus using the same
- 专利标题（中）： 砂轮修整工具及其制造方法，以及修整装置，用于制造砂轮的方法和使用其的晶片边缘磨削装置
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申请号： US13442584申请日： 2012-04-09
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公开(公告)号： US09211631B2公开(公告)日： 2015-12-15
- 发明人: Yong-Dug Kim , Gye-Je Cho , Mun-Suk Yong , Hwan-Yun Jung , Kyung-Moo Lee , Dong-Hwan Hyun , Jae-Young Kim
- 申请人： Yong-Dug Kim , Gye-Je Cho , Mun-Suk Yong , Hwan-Yun Jung , Kyung-Moo Lee , Dong-Hwan Hyun , Jae-Young Kim
- 申请人地址： KR Gumi
- 专利权人： Siltron, Inc.
- 当前专利权人： Siltron, Inc.
- 当前专利权人地址： KR Gumi
- 代理机构： Greer Burns & Crain Ltd.
- 优先权： KR10-2007-0131306 20071214
- 主分类号： B24B53/07
- IPC分类号： B24B53/07 ; B24B9/06 ; B24D18/00
摘要：
The present invention relates to a grinding wheel truing tool, its manufacturing method, and a truing apparatus, a method for manufacturing a grinding wheel and a wafer edge grinding apparatus using the same. The grinding wheel truing tool of the present invention compensates a groove of a fine-grinding wheel for fine-grinding a wafer edge, and includes a truer having an edge of the same angle as a slanted surface of the groove of the fine-grinding wheel and a cross-sectional shape corresponding to a cross-sectional shape of the groove. The present invention uses the truing tool to easily process the groove of the grinding wheel for fine-grinding the wafer edge.