Invention Grant
US09212910B2 Microelectromechanical gyroscope with self-calibration function and method of calibrating a microelectromechanical gyroscope 有权
具有自校准功能的微机电陀螺仪和校准微机电陀螺仪的方法

Microelectromechanical gyroscope with self-calibration function and method of calibrating a microelectromechanical gyroscope
Abstract:
A microelectromechanical gyroscope having a supporting structure; a mass capacitively coupled to the supporting structure and movable with a first degree of freedom and a second degree of freedom, in response to rotations of the supporting structure about an axis; driving components, for keeping the mass in oscillation according to the first degree of freedom; a read interface for detecting transduction signals indicating the capacitive coupling between the mass and the supporting structure; and capacitive compensation modules for modifying the capacitive coupling between the mass and the supporting structure. Calibration components detect systematic errors from the transduction signals and modify the capacitive compensation modules as a function of the transduction signals so as to attenuate the systematic errors.
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