Invention Grant
US09213142B2 Device and method for micro-electro-mechanical-system photonic switch 有权
微电子机械系统光子开关的装置和方法

Device and method for micro-electro-mechanical-system photonic switch
Abstract:
In one embodiment, a micro-electro-mechanical-system (MEMS) photonic switch includes a first plurality of collimators and a first minor array optically coupled to the first plurality of collimators, where the first minor array includes a first plurality of minors, and where a first minor of the first plurality of minors includes a first plurality of photodiodes integrated on the first mirror.
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