Invention Grant
- Patent Title: Integrated circuit devices including a through-silicon via structure and methods of fabricating the same
- Patent Title (中): 包括硅通孔结构的集成电路器件及其制造方法
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Application No.: US14506930Application Date: 2014-10-06
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Publication No.: US09214411B2Publication Date: 2015-12-15
- Inventor: Jae-Hwa Park , Kwang-jin Moon , Suk-Chul Bang , Byung-Iyul Park , Jeong-gi Jin , Tae-seong Kim , Sung-hee Kang
- Applicant: Jae-Hwa Park , Kwang-jin Moon , Suk-Chul Bang , Byung-Iyul Park , Jeong-gi Jin , Tae-seong Kim , Sung-hee Kang
- Applicant Address: KR
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR
- Agency: Myers Bigel Sibley & Sajovec
- Priority: KR10-2013-0122956 20131015
- Main IPC: H01L29/40
- IPC: H01L29/40 ; H01L23/48 ; H01L23/485 ; H01L23/50 ; H01L21/768 ; H01L23/498 ; H01L25/065 ; H01L25/18

Abstract:
Integrated circuit (IC) devices are provided including: a first multi-layer wiring structure including a plurality of first wiring layers in a first region of a substrate at different levels and spaced apart from one another, and a plurality of first contact plugs between the plurality of first wiring layers and connected to the plurality of first wiring layers; a through-silicon via (TSV) landing pad including a first pad layer in a second region of the substrate at a same level as that of at least one first wiring layer from among the plurality of first wiring layers, and a second pad layer at a same level as that of at least one first contact plug from among the plurality of first contact plugs and contacts the first pad layer; a second multi-layer wiring structure on the TSV landing pad; and a TSV structure that passes through the substrate and is connected to the second multi-layer wiring structure through the TSV landing pad.
Public/Granted literature
- US20150102497A1 Integrated Circuit Devices Including a Through-Silicon Via Structure and Methods of Fabricating the Same Public/Granted day:2015-04-16
Information query
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