Invention Grant
US09219062B2 Integrated circuits with improved source/drain contacts and methods for fabricating such integrated circuits
有权
具有改善的源极/漏极触点的集成电路以及用于制造这种集成电路的方法
- Patent Title: Integrated circuits with improved source/drain contacts and methods for fabricating such integrated circuits
- Patent Title (中): 具有改善的源极/漏极触点的集成电路以及用于制造这种集成电路的方法
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Application No.: US13902459Application Date: 2013-05-24
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Publication No.: US09219062B2Publication Date: 2015-12-22
- Inventor: Peter Zeitzoff , Abhijeet Paul
- Applicant: GLOBALFOUNDRIES, Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Ingrassia Fisher & Lorenz, P.C.
- Main IPC: H01L21/70
- IPC: H01L21/70 ; H01L27/088 ; H01L29/66 ; H01L29/417 ; H01L29/78 ; H01L21/8234

Abstract:
Integrated circuits and methods for fabricating integrated circuits are provided. In accordance with an exemplary embodiment, an integrated circuit includes a semiconductor substrate with a fin structure overlying the semiconductor substrate and having a source region, a drain region, and a channel region between the source region and drain region. The source region and the drain region each have a recessed surface. A source contact is adjacent the recessed surface in the source region and a drain contact is adjacent the recessed surface in the drain region. Linear current paths are defined from the channel region to the source contact and from the channel region to the drain contact.
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