发明授权
- 专利标题： Method for producing an optical filter in an integrated circuit, and corresponding integrated circuit
- 专利标题（中）： 集成电路中的滤光器的制造方法以及相应的集成电路
-
申请号： US14489698申请日： 2014-09-18
-
公开(公告)号： US09219095B2公开(公告)日： 2015-12-22
- 发明人: Michel Marty , Sebastien Jouan , Laurent Frey
- 申请人： STMicroelectronics SA , STMicroelectronics (Crolles 2) SAS , Commissariat A L'Energie Atomique et aux Energies Alternatives
- 申请人地址： FR Montrouge FR Crolles FR Paris
- 专利权人： STMicroelectronics SA,STMicroelectronics (Crolles 2) SAS,Commissariat A L'Energie Atomique et aux Energies Alternatives
- 当前专利权人： STMicroelectronics SA,STMicroelectronics (Crolles 2) SAS,Commissariat A L'Energie Atomique et aux Energies Alternatives
- 当前专利权人地址： FR Montrouge FR Crolles FR Paris
- 代理机构： Gardere Wynne Sewell LLP
- 优先权： FR1359026 20130919
- 主分类号： H01L27/146
- IPC分类号： H01L27/146 ; H01L29/49 ; H01L31/107
摘要：
An integrated circuit includes a substrate and an interconnect part above the substrate, and further includes a photosensitive region in the substrate. A filter is provided aligned with the photosensitive region. The filter is formed by at least one layer of filter material. In one implementation for front side illumination, the layer of filter material is positioned above the photosensitive region between the interconnect part and the substrate. In another implementation for back side illumination, the layer of filter material is positioned below the photosensitive region opposite the interconnect part. The layer of filter material is configured such that a product of the thickness of the layer of filter material and the imaginary part of the refractive index of the layer of filter material is above 1 nm.
公开/授权文献
信息查询
IPC分类:
