Invention Grant
- Patent Title: Method for producing an optical filter in an integrated circuit, and corresponding integrated circuit
- Patent Title (中): 集成电路中的滤光器的制造方法以及相应的集成电路
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Application No.: US14489698Application Date: 2014-09-18
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Publication No.: US09219095B2Publication Date: 2015-12-22
- Inventor: Michel Marty , Sebastien Jouan , Laurent Frey
- Applicant: STMicroelectronics SA , STMicroelectronics (Crolles 2) SAS , Commissariat A L'Energie Atomique et aux Energies Alternatives
- Applicant Address: FR Montrouge FR Crolles FR Paris
- Assignee: STMicroelectronics SA,STMicroelectronics (Crolles 2) SAS,Commissariat A L'Energie Atomique et aux Energies Alternatives
- Current Assignee: STMicroelectronics SA,STMicroelectronics (Crolles 2) SAS,Commissariat A L'Energie Atomique et aux Energies Alternatives
- Current Assignee Address: FR Montrouge FR Crolles FR Paris
- Agency: Gardere Wynne Sewell LLP
- Priority: FR1359026 20130919
- Main IPC: H01L27/146
- IPC: H01L27/146 ; H01L29/49 ; H01L31/107
Abstract:
An integrated circuit includes a substrate and an interconnect part above the substrate, and further includes a photosensitive region in the substrate. A filter is provided aligned with the photosensitive region. The filter is formed by at least one layer of filter material. In one implementation for front side illumination, the layer of filter material is positioned above the photosensitive region between the interconnect part and the substrate. In another implementation for back side illumination, the layer of filter material is positioned below the photosensitive region opposite the interconnect part. The layer of filter material is configured such that a product of the thickness of the layer of filter material and the imaginary part of the refractive index of the layer of filter material is above 1 nm.
Public/Granted literature
- US20150076573A1 METHOD FOR PRODUCING AN OPTICAL FILTER IN AN INTEGRATED CIRCUIT, AND CORRESPONDING INTEGRATED CIRCUIT Public/Granted day:2015-03-19
Information query
IPC分类:
