Invention Grant
US09224775B2 Back side illumination image sensor with low dark current 有权
具有低暗电流的背面照明图像传感器

Back side illumination image sensor with low dark current
Abstract:
An integrated circuit includes a back side illuminated image sensor formed by a substrate supporting at least one pixel, an interconnect part situated above a front side of the substrate and an anti-reflective layer situated above a back side of the substrate. The anti-reflective layer may be formed of a silicon nitride layer. An additional layer is situated above the anti-reflective layer. The additional layer is formed of one of amorphous silicon nitride or hydrogenated amorphous silicon nitride, in which the ratio of the number of silicon atoms per cubic centimeter to the number of nitrogen atoms per cubic centimeter is greater than 0.7.
Public/Granted literature
Information query
Patent Agency Ranking
0/0