发明授权
- 专利标题: Minimum-spacing circuit design and layout for PICA
- 专利标题(中): PICA的最小间距电路设计和布局
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申请号: US13463166申请日: 2012-05-03
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公开(公告)号: US09229044B2公开(公告)日: 2016-01-05
- 发明人: Herschel A. Ainspan , Seongwon Kim , Franco Stellari , Alan J. Weger
- 申请人: Herschel A. Ainspan , Seongwon Kim , Franco Stellari , Alan J. Weger
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: Tutunjian & Bitetto, P.C.
- 代理商 Anne V. Dougherty
- 主分类号: H03K19/00
- IPC分类号: H03K19/00 ; G01R31/26 ; H03K19/094 ; H03K19/14
摘要:
PICA test methods are shown that includes forming semiconductor devices having proximal light emitting regions, such that the light emitting regions are grouped into distinct shapes separated by a distance governed by a target resolution size; forming logic circuits to control the semiconductor devices; activating the one or more semiconductor devices by providing an input signal; and suppressing light emissions from one or more of the activated semiconductor devices by providing one or more select signals to the logic circuits.
公开/授权文献
- US20130280828A1 MINIMUM-SPACING CIRCUIT DESIGN AND LAYOUT FOR PICA 公开/授权日:2013-10-24
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