发明授权
US09229222B2 Alignment methods in fluid-filled MEMS displays 有权
流体填充的MEMS显示器中的对准方法

Alignment methods in fluid-filled MEMS displays
摘要:
This invention relates to MEMS display apparatus and methods for assembly thereof that include a plurality of light modulators having components substantially surrounded in a liquid that reduces the effects of stiction and improves the optical and electromechanical performance of the display apparatus. The invention also relates to methods for aligning components of a MEMS display to establish a correspondence between the plurality of light modulators and a plurality of apertures to regulate the transmission of light through the apparatus.
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