Invention Grant
- Patent Title: Semiconductor device and method for forming the same
-
Application No.: US14677923Application Date: 2015-04-02
-
Publication No.: US09231065B2Publication Date: 2016-01-05
- Inventor: Jae Bum Kim
- Applicant: SK hynix Inc.
- Applicant Address: KR Icheon
- Assignee: SK HYNIX INC.
- Current Assignee: SK HYNIX INC.
- Current Assignee Address: KR Icheon
- Priority: KR10-2013-0089666 20130729
- Main IPC: H01L29/227
- IPC: H01L29/227 ; H01L21/322 ; H01L29/36 ; H01L29/06 ; H01L21/265 ; H01L21/8238

Abstract:
A semiconductor device in which a gettering layer is formed in a semiconductor substrate, and a method for forming the same are disclosed, resulting in increased reliability of the semiconductor substrate including the gettering layer. The semiconductor device includes a semiconductor substrate; a gettering layer formed of a first-type impurity and a second-type impurity in the semiconductor substrate so as to perform gettering of metal ion; and a deep-well region formed over the gettering layer in the semiconductor substrate.
Public/Granted literature
- US20150214310A1 SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME Public/Granted day:2015-07-30
Information query
IPC分类: