Invention Grant
- Patent Title: Solid state light source assisted processing
- Patent Title (中): 固态光源辅助处理
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Application No.: US13779004Application Date: 2013-02-27
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Publication No.: US09232569B2Publication Date: 2016-01-05
- Inventor: Joseph Johnson , John Gerling , Klaus Schuegraf
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: A21B1/00
- IPC: A21B1/00 ; H05B3/00 ; H01L21/67
Abstract:
Apparatus for providing pulsed or continuous energy in a process chamber are provided herein. The apparatus may include a lamphead including a set of lamps, wherein the first set of lamps are not solid state light sources, and a set of solid state light sources disposed on the lamp head, to provide pulsed or continuous energy to the process chamber.
Public/Granted literature
- US20140238970A1 SOLID STATE LIGHT SOURCE ASSISTED PROCESSING Public/Granted day:2014-08-28
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