发明授权
- 专利标题： Gas refraction compensation for laser-sustained plasma bulbs
- 专利标题（中）： 激光持续等离子体灯泡的气体折射补偿
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申请号： US14476149申请日： 2014-09-03
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公开(公告)号： US09232622B2公开(公告)日： 2016-01-05
- 发明人: Ilya Bezel , Anatoly Shchemelinin , Alex Salnik , Anant Chimmalgi
- 申请人： KLA-Tencor Corporation
- 申请人地址： US CA Milpitas
- 专利权人： KLA-Tencor Corporation
- 当前专利权人： KLA-Tencor Corporation
- 当前专利权人地址： US CA Milpitas
- 代理机构： Meyertons, Hood, Kivlin, Kowert & Goetzel, P.C.
- 代理商 Eric B. Meyertons
- 主分类号： F21V5/00
- IPC分类号： F21V5/00 ; F21V7/00 ; F21V13/00 ; F21V13/04 ; H01J61/02 ; H05G2/00 ; G03F7/20 ; H01J61/30 ; H01J61/33 ; H01J61/04
摘要：
A laser-sustained plasma illuminator system includes at least one laser light source to provide light. At least one reflector focuses the light from the laser light source at a focal point of the reflector. An enclosure substantially filled with a gas is positioned at or near the focal point of the reflector. The light from the laser light source at least partially sustains a plasma contained in the enclosure. The enclosure has at least one wall with at least one property that is varied to compensate for optical aberrations in the system.
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