Invention Grant
- Patent Title: Gas refraction compensation for laser-sustained plasma bulbs
- Patent Title (中): 激光持续等离子体灯泡的气体折射补偿
-
Application No.: US14476149Application Date: 2014-09-03
-
Publication No.: US09232622B2Publication Date: 2016-01-05
- Inventor: Ilya Bezel , Anatoly Shchemelinin , Alex Salnik , Anant Chimmalgi
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Meyertons, Hood, Kivlin, Kowert & Goetzel, P.C.
- Agent Eric B. Meyertons
- Main IPC: F21V5/00
- IPC: F21V5/00 ; F21V7/00 ; F21V13/00 ; F21V13/04 ; H01J61/02 ; H05G2/00 ; G03F7/20 ; H01J61/30 ; H01J61/33 ; H01J61/04

Abstract:
A laser-sustained plasma illuminator system includes at least one laser light source to provide light. At least one reflector focuses the light from the laser light source at a focal point of the reflector. An enclosure substantially filled with a gas is positioned at or near the focal point of the reflector. The light from the laser light source at least partially sustains a plasma contained in the enclosure. The enclosure has at least one wall with at least one property that is varied to compensate for optical aberrations in the system.
Public/Granted literature
- US20140367592A1 GAS REFRACTION COMPENSATION FOR LASER-SUSTAINED PLASMA BULBS Public/Granted day:2014-12-18
Information query