Invention Grant
- Patent Title: Forming patterns using crosslinkable reactive polymers
- Patent Title (中): 使用可交联反应性聚合物形成图案
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Application No.: US14084711Application Date: 2013-11-20
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Publication No.: US09235128B2Publication Date: 2016-01-12
- Inventor: Allan Wexler , Grace Ann Bennett , Kimberly S. Lindner
- Applicant: Allan Wexler , Grace Ann Bennett , Kimberly S. Lindner
- Applicant Address: US NY Rochester
- Assignee: EASTMAN KODAK COMPANY
- Current Assignee: EASTMAN KODAK COMPANY
- Current Assignee Address: US NY Rochester
- Agent J. Lanny Tucker
- Main IPC: G03F7/038
- IPC: G03F7/038 ; G03F7/26 ; G03F7/004 ; G03F7/105

Abstract:
Various patterning methods utilize certain crosslinkable reactive polymers comprise -A- and -B- recurring units, arranged randomly along a backbone. The -A- recurring units comprise pendant aromatic sulfonic acid oxime ester groups that are capable of providing pendant aromatic sulfonic acid groups upon irradiation with radiation having a λmax of at least 150 nm and up to and including 450 nm. The -A- recurring units are present in the reactive polymer in an amount of up to and including 98 mol % based on total reactive polymer recurring units. The -B- recurring units comprise pendant groups that provide crosslinking upon generation of the aromatic sulfonic acid groups in the -A- recurring units. The -B- recurring units are present in an amount of at least 2 mol %, based on total reactive polymer recurring units.
Public/Granted literature
- US20150140481A1 FORMING PATTERNS USING CROSSLINKABLE REACTIVE POLYMERS Public/Granted day:2015-05-21
Information query
IPC分类: