Invention Grant
- Patent Title: Composition for tungsten CMP
- Patent Title (中): 钨CMP的组成
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Application No.: US14203621Application Date: 2014-03-11
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Publication No.: US09238754B2Publication Date: 2016-01-19
- Inventor: Steven Grumbine , Jeffrey Dysard , Lin Fu , William Ward , Glenn Whitener
- Applicant: Cabot Microelectronics Corporation
- Applicant Address: US IL Aurora
- Assignee: Cabot Microelectronics Corporation
- Current Assignee: Cabot Microelectronics Corporation
- Current Assignee Address: US IL Aurora
- Agent Thomas E. Omholt; Christopher C. Streinz; Arlene Hornilla
- Main IPC: C09G1/02
- IPC: C09G1/02 ; H01L21/306 ; H01L21/321

Abstract:
A chemical mechanical polishing composition for polishing a substrate having a tungsten layer includes a water based liquid carrier, a colloidal silica abrasive dispersed in the liquid carrier and having a permanent positive charge of at least 6 mV, an amine compound in solution in the liquid carrier, and an iron containing accelerator. A method for chemical mechanical polishing a substrate including a tungsten layer includes contacting the substrate with the above described polishing composition, moving the polishing composition relative to the substrate, and abrading the substrate to remove a portion of the tungsten from the substrate and thereby polish the substrate.
Public/Granted literature
- US20150259572A1 COMPOSITION FOR TUNGSTEN CMP Public/Granted day:2015-09-17
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