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US09239432B2 Photonics grating coupler and method of manufacture 有权
光子学光栅耦合器及其制造方法

Photonics grating coupler and method of manufacture
Abstract:
A structure for coupling an optical signal between an integrated circuit photonic structure and an external optical fiber is disclosed as in a method of formation. The coupling structure is sloped relative to a horizontal surface of the photonic structure such that light entering or leaving the photonic structure is substantially normal to its upper surface.
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