Invention Grant
- Patent Title: On-chip diode with fully depleted semicondutor devices
- Patent Title (中): 具有完全耗尽半导体器件的片上二极管
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Application No.: US14705397Application Date: 2015-05-06
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Publication No.: US09240355B2Publication Date: 2016-01-19
- Inventor: Kangguo Cheng , Ali Khakifirooz , Ghavam G. Shahidi , Davood Shahrjerdi
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/84 ; H01L21/8238 ; H01L27/12 ; H01L27/06

Abstract:
An electrical device including a first conductivity semiconductor device present in a first semiconductor device region of an SOI substrate, and a second conductivity semiconductor device present in a second semiconductor device region of the SOI substrate. The electrical device also includes a diode present within a diode region of the SOI substrate that includes a first doped layer of a first conductivity semiconductor material that is present on an SOI layer of the SOI substrate. The first doped layer includes a first plurality of protrusions extending from a first connecting base portion. The semiconductor diode further includes a second doped layer of the second conductivity semiconductor material present over the first doped layer. The second doped layer including a second plurality of protrusions extending from a second connecting base portion. The second plurality of protrusions is present between and separating the first plurality of protrusions.
Public/Granted literature
- US20150235908A1 ON-CHIP DIODE WITH FULLY DEPLETED SEMICONDUTOR DEVICES Public/Granted day:2015-08-20
Information query
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