Invention Grant
- Patent Title: Asymmetric stressor DRAM
- Patent Title (中): 不对称应力源DRAM
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Application No.: US14476897Application Date: 2014-09-04
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Publication No.: US09240482B2Publication Date: 2016-01-19
- Inventor: Ravi K. Dasaka , Shreesh Narasimha , Ahmed Nayaz Noemaun , Karen A. Nummy , Katsunori Onishi , Paul C. Parries , Chengwen Pei , Geng Wang , Bidan Zhang
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/78 ; H01L27/108

Abstract:
A stressor structure is formed within a drain region of an access transistor in a dynamic random access memory (DRAM) cell in a semiconductor-on-insulator (SOI) substrate without forming any stressor structure in a source region of the DRAM cell. The stressor structure induces a stress gradient within the body region of the access transistor, which induces a greater leakage current at the body-drain junction than at the body-source junction. The body potential of the access transistor has a stronger coupling to the drain voltage than to the source voltage. An asymmetric etch of a gate dielectric cap, application of a planarization material layer, and a non-selective etch of the planarization material layer and the gate dielectric cap can be employed to form the DRAM cell.
Public/Granted literature
- US20150349121A1 ASYMMETRIC STRESSOR DRAM Public/Granted day:2015-12-03
Information query
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