Invention Grant
- Patent Title: Method for making a photonic integrated circuit having a plurality of lenses
- Patent Title (中): 制造具有多个透镜的光子集成电路的方法
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Application No.: US14802504Application Date: 2015-07-17
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Publication No.: US09244236B2Publication Date: 2016-01-26
- Inventor: John Hongguang Zhang
- Applicant: STMicroelectronics, Inc.
- Applicant Address: US TX Coppell
- Assignee: STMicroelectronics, Inc.
- Current Assignee: STMicroelectronics, Inc.
- Current Assignee Address: US TX Coppell
- Agency: Gardere Wynne Sewell LLP
- Main IPC: G02B6/42
- IPC: G02B6/42 ; G02B6/43 ; G02B6/122 ; G02B6/124 ; G02B6/132 ; G02B6/136 ; G02B6/12

Abstract:
A photonic integrated circuit includes optical circuitry fabricated over an underlying circuitry layer. The optical circuitry includes a dielectric material having recesses disposed within, layers of a light waveguide material deposited within the recesses, and lenses disposed over each layer of waveguide material. The underlying circuitry layer may include, for example, a semiconductor wafer as well as circuitry fabricated during front end of line (FEOL) semiconductor manufacturing such as, for example, sources, gates, drains, interconnects, contacts, resistors, and other circuitry that may be manufactured during FEOL processes. The underlying circuitry layer may also include circuitry manufactured during back end of line semiconductor manufacturing processes such as, for example, interconnect structures, metallization layers, and contacts.
Public/Granted literature
- US20150323739A1 METHOD FOR MAKING A PHOTONIC INTEGRATED CIRCUIT HAVING A PLURALITY OF LENSES Public/Granted day:2015-11-12
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