发明授权
- 专利标题： Micro movable device and optical switching apparatus
- 专利标题（中）： 微动移动装置和光开关装置
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申请号： US12573393申请日： 2009-10-05
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公开(公告)号： US09244269B2公开(公告)日： 2016-01-26
- 发明人: Hiromitsu Soneda , Tsuyoshi Matsumoto , Yoshihiro Mizuno , Norinao Kouma , Hisao Okuda , Osamu Tsuboi
- 申请人： Hiromitsu Soneda , Tsuyoshi Matsumoto , Yoshihiro Mizuno , Norinao Kouma , Hisao Okuda , Osamu Tsuboi
- 申请人地址： US DE Wilmington
- 专利权人： DRNC Holdings, Inc.
- 当前专利权人： DRNC Holdings, Inc.
- 当前专利权人地址： US DE Wilmington
- 代理机构： Baker & Hostetler LLP
- 优先权： JP2008-263658 20081010
- 主分类号： G02B6/42
- IPC分类号： G02B6/42 ; G02B26/08 ; B81C3/00 ; G01D5/28 ; G02B6/35 ; H02N1/00
摘要：
A micro movable device includes: a micro movable substrate in which a micro movable unit is formed, the micro movable unit including a frame, a movable part, and a coupling part for coupling the frame and the movable part to define an axial center of rotation of the movable part; a supporting substrate; and a reinforced fixed part provided between the frame and the supporting substrate, and including a first spacer that joins the frame to the supporting substrate and an adhesive part that covers the first spacer and joins the frame to the supporting substrate, wherein the frame includes a first area facing the movable part in a direction of extent of the axial center, and a second area different from the first area, and the reinforced fixed part is bonded to the second area of the frame.
公开/授权文献
- US20100092130A1 MICRO MOVABLE DEVICE AND OPTICAL SWITCHING APPARATUS 公开/授权日：2010-04-15