Invention Grant
- Patent Title: Method and system for in-line real-time measurements of layers of multilayered front contacts of photovoltaic devices and calculation of opto-electronic properties and layer thicknesses thereof
- Patent Title (中): 用于在线实时测量光伏器件的多层前触点层的方法和系统，以及光电特性及其层厚度的计算
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Application No.: US14133946Application Date: 2013-12-19
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Publication No.: US09245808B2Publication Date: 2016-01-26
- Inventor: Benyamin Buller , Douglas Dauson , David Hwang , Scott Mills , Dale Roberts , Rui Shao , Zhibo Zhao
- Applicant: FIRST SOLAR, INC
- Applicant Address: US OH Perrysburg
- Assignee: FIRST SOLAR, INC.
- Current Assignee: FIRST SOLAR, INC.
- Current Assignee Address: US OH Perrysburg
- Agency: Dickstein Shapiro LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/66 ; G01B11/06 ; H01L31/0224 ; H01L31/18 ; G01R31/40
Abstract:
A method and system for real-time, in-line calculations of opto-electronic properties and thickness of the layers of multi-layered transparent conductive oxide stacks of photovoltaic devices is provided. The method and system include taking measurements of each layer of the stack during deposition thereof. The measurements are then used to calculate the opto-electronic properties and thicknesses of the layers in real-time.
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