发明授权
US09248418B1 Wafer mixing device 有权
晶圆搅拌装置

Wafer mixing device
摘要:
A stationary material mixing apparatus located within a cylindrically-shaped conduit. The material mixing apparatus includes a front face, rear face, cone-shaped module having a base and apex supported on said front face and extending toward an upstream end of the conduit. A channel for introducing an additive to the fluid stream is provided, the additive being introduced at the apex of the cone-shaped module, the material mixing apparatus further being provided with three circular openings positioned 120 degrees from each other and each having a baffle configured therein.
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