Invention Grant
- Patent Title: Display substrate and method of manufacturing a display substrate
- Patent Title (中): 显示基板和显示基板的制造方法
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Application No.: US14182989Application Date: 2014-02-18
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Publication No.: US09252284B2Publication Date: 2016-02-02
- Inventor: Jong-Chan Lee , Yoon-Ho Khang , Su-Hyoung Kang , Dong-Jo Kim , Ji-Seon Lee , Myoung-Geun Cha , Deuk-Myung Ji
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2013-0105010 20130902
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/66

Abstract:
A display substrate and a method for manufacturing a display substrate are disclosed. In the method, a gate electrode is formed on a base substrate. An active pattern is formed using an oxide semiconductor. The active pattern partially overlaps the gate electrode. A first insulation layer pattern and a second insulation layer pattern are sequentially formed on the active pattern. The first insulation layer pattern and the second insulation layer pattern overlap the gate electrode. A third insulation layer is formed to cover the active pattern, the first insulation layer pattern and the second insulation layer pattern. Either the first insulation layer pattern or the second insulation layer pattern includes aluminum oxide. Forming the first insulation layer pattern and the second insulation layer pattern includes performing a backside exposure process using the gate electrode as an exposure mask.
Public/Granted literature
- US20150060843A1 DISPLAY SUBSTRATE AND METHOD OF MANUFACTURING A DISPLAY SUBSTRATE Public/Granted day:2015-03-05
Information query
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