Invention Grant
- Patent Title: Package structure having MEMS element
- Patent Title (中): 具有MEMS元件的封装结构
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Application No.: US14487602Application Date: 2014-09-16
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Publication No.: US09254994B2Publication Date: 2016-02-09
- Inventor: Chi-Hsin Chiu , Chih-Ming Huang , Chang-Yueh Chan , Hsin-Yi Liao , Chun-Chi Ke
- Applicant: Siliconware Precision Industries Co., Ltd.
- Applicant Address: TW Taichung
- Assignee: Siliconware Precision Industries Co., Ltd.
- Current Assignee: Siliconware Precision Industries Co., Ltd.
- Current Assignee Address: TW Taichung
- Agency: Mintz Levin Cohn Ferris Glovsky and Popeo, P.C.
- Agent Peter F. Corless; Steven M. Jensen
- Priority: TW99101443A 20100120
- Main IPC: H01L29/24
- IPC: H01L29/24 ; B81B7/00 ; H01L23/31 ; H01L23/552 ; H01L21/56 ; H01L23/00

Abstract:
A package structure having at least an MEMS element is provided, including a chip having electrical connecting pads and the MEMS element; a lid disposed on the chip to cover the MEMS element and having a metal layer provided thereon; first sub-bonding wires electrically connecting to the electrical connecting pads; second sub-bonding wires electrically connecting to the metal layer; an encapsulant disposed on the chip, wherein the top ends of the first and second sub-bonding wires are exposed from the encapsulant; and metallic traces disposed on the encapsulant and electrically connecting to the first sub-bonding wires. The package structure advantageously features reduced size, relatively low costs, diverse bump locations, and an enhanced EMI shielding effect.
Public/Granted literature
- US20150102433A1 PACKAGE STRUCTURE HAVING MEMS ELEMENT Public/Granted day:2015-04-16
Information query
IPC分类: