Invention Grant
US09255802B2 Resonator element, resonator, oscillator, electronic apparatus, physical quantity sensor, mobile object, and frequency adjustment method of resonator element
有权
谐振器元件，谐振器，振荡器，电子设备，物理量传感器，移动物体和谐振元件的频率调节方法
- Patent Title: Resonator element, resonator, oscillator, electronic apparatus, physical quantity sensor, mobile object, and frequency adjustment method of resonator element
- Patent Title (中): 谐振器元件，谐振器，振荡器，电子设备，物理量传感器，移动物体和谐振元件的频率调节方法
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Application No.: US14582606Application Date: 2014-12-24
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Publication No.: US09255802B2Publication Date: 2016-02-09
- Inventor: Akinori Yamada , Shuhei Yoshida , Takashi Ito , Keiji Nakagawa
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2013-273626 20131227
- Main IPC: H03B5/32
- IPC: H03B5/32 ; H03H9/215 ; G01C19/5607 ; H03H9/02 ; H03H9/05 ; H03H9/10 ; H03H3/02 ; H03H3/04
Abstract:
A resonator element includes a base portion, and a vibrating arm which extends from the base portion and on which a weight portion is provided, and the weight portion includes a first weight portion which is disposed on one main surface of a distal end portion of the vibrating arm, and a second weight portion which is disposed on the distal end side with respect to the first weight portion and has a thickness smaller than that of the first weight portion. The vibrating arm transmits an energy beam, and a laser incidence area where incidence of the energy beam to the inside of the vibrating arm is allowed, is disposed in a position of the other main surface on the opposite side of the vibrating arm overlapped with the second weight portion.
Public/Granted literature
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