Invention Grant
- Patent Title: Bottom-up plating of through-substrate vias
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Application No.: US14522633Application Date: 2014-10-24
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Publication No.: US09257336B2Publication Date: 2016-02-09
- Inventor: Mukta G. Farooq , John A. Fitzsimmons , Troy L. Graves-Abe
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Heslin Rothenberg Farley & Mesiti P.C.
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L21/768 ; H01L21/683 ; H01L23/00

Abstract:
According to one embodiment of the present invention, a method of plating a TSV hole in a substrate is provided. The TSV hole may include an open end terminating at a conductive pad, a stack of wiring levels, and a plurality of chip interconnects. The method of plating a TSV may include attaching a handler to the plurality of chip interconnects, the handler having a conductive layer in electrical contact with the plurality of chip interconnects; exposing a closed end of the TSV hole, including the conductive pad, to an electrolyte solution; and applying an electrical potential along an electrical path from the conductive layer to the conductive pad causing conductive material from the electrolyte solution to deposit on the conductive pad and within the TSV hole, the electrical path including the conductive layer, the plurality of chip interconnects, the stack of wiring levels and the conductive pad.
Public/Granted literature
- US20150056804A1 BOTTOM-UP PLATING OF THROUGH-SUBSTRATE VIAS Public/Granted day:2015-02-26
Information query
IPC分类: