发明授权
- 专利标题： Temporary liquid thermal interface material for surface tension adhesion and thermal control
- 专利标题（中）： 临时液体热界面材料，用于表面张力粘附和热控制
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申请号： US13890776申请日： 2013-05-09
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公开(公告)号： US09269603B2公开(公告)日： 2016-02-23
- 发明人: Luc Guerin , Marc D. Knox , George J. Lawson , Van T. Truong , Steve Whitehead
- 申请人： INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址： KY Grand Cayman
- 专利权人： GLOBALFOUNDRIES INC.
- 当前专利权人： GLOBALFOUNDRIES INC.
- 当前专利权人地址： KY Grand Cayman
- 代理机构： Roberts Mlotkowski Safran & Cole, P.C.
- 代理商 Michael LeStrange; Andrew M. Calderon
- 主分类号： H01L21/683
- IPC分类号： H01L21/683
摘要：
An assembly including a liquid thermal interface material for surface tension adhesion and thermal control used during electrical/thermal test of a 3D wafer and methods of use. The method includes temporarily attaching a thinned wafer to a carrier wafer by applying a non-adhesive material therebetween and pressing the thinned wafer and the blank silicon-based carrier wafer together.
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