Invention Grant
US09269664B2 Semiconductor package with through silicon via interconnect and method for fabricating the same 有权
具有通过硅芯片的半导体封装及其制造方法

Semiconductor package with through silicon via interconnect and method for fabricating the same
Abstract:
The invention provides a semiconductor package with a through silicon via (TSV) interconnect and a method for fabricating the same. An exemplary embodiment of the semiconductor package with a TSV interconnect includes a semiconductor substrate. A through hole is formed through the semiconductor substrate. A TSV interconnect is disposed in a through hole. A conductive layer lines a sidewall of the through hole, surrounding the TSV interconnect.
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