Invention Grant
- Patent Title: Semiconductor package with through silicon via interconnect and method for fabricating the same
- Patent Title (中): 具有通过硅芯片的半导体封装及其制造方法
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Application No.: US13846138Application Date: 2013-03-18
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Publication No.: US09269664B2Publication Date: 2016-02-23
- Inventor: Ming-Tzong Yang , Cheng-Chou Hung , Yu-Hua Huang , Wei-Che Huang
- Applicant: MediaTek Inc.
- Applicant Address: TW Hsin-Chu
- Assignee: MEDIATEK INC.
- Current Assignee: MEDIATEK INC.
- Current Assignee Address: TW Hsin-Chu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L23/522
- IPC: H01L23/522 ; H01L21/768 ; H01L23/48

Abstract:
The invention provides a semiconductor package with a through silicon via (TSV) interconnect and a method for fabricating the same. An exemplary embodiment of the semiconductor package with a TSV interconnect includes a semiconductor substrate. A through hole is formed through the semiconductor substrate. A TSV interconnect is disposed in a through hole. A conductive layer lines a sidewall of the through hole, surrounding the TSV interconnect.
Public/Granted literature
- US20130264676A1 SEMICONDUCTOR PACKAGE WITH THROUGH SILICON VIA INTERCONNECT AND METHOD FOR FABRICATING THE SAME Public/Granted day:2013-10-10
Information query
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