Invention Grant
US09275827B2 Charged particle beam apparatus having needle probe that tracks target position changes
有权
具有跟踪目标位置的针探针的带电粒子束装置改变
- Patent Title: Charged particle beam apparatus having needle probe that tracks target position changes
- Patent Title (中): 具有跟踪目标位置的针探针的带电粒子束装置改变
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Application No.: US14617259Application Date: 2015-02-09
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Publication No.: US09275827B2Publication Date: 2016-03-01
- Inventor: Atsushi Uemoto , Tatsuya Asahata , Hidekazu Suzuki , Yo Yamamoto
- Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
- Applicant Address: JP
- Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee: HITACHI HIGH-TECH SCIENCE CORPORATION
- Current Assignee Address: JP
- Agency: Adams & Wilks
- Priority: JP2014-024421 20140212
- Main IPC: H01J37/20
- IPC: H01J37/20 ; G01N1/32 ; H01J37/18 ; H01J37/28 ; H01J37/22
Abstract:
A charged particle beam apparatus includes: a charged particle beam column; a detector configured to detect secondary charged particles; an image processor; a display device; a needle arranged in an irradiation area of charged particle beam; a needle actuator; a user interface; and a controller configured to control the needle actuator to actuate the needle in accordance with a target position that is set by the user interface. The controller controls the needle actuator to move the needle to track a change of the target position that is set by the user interface.
Public/Granted literature
- US20150228450A1 CHARGED PARTICLE BEAM APPARATUS Public/Granted day:2015-08-13
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