发明授权
US09275830B2 Scanning charged particle microscope, image acquisition method, and electron detection method
有权
扫描带电粒子显微镜,图像采集方法和电子检测方法
- 专利标题: Scanning charged particle microscope, image acquisition method, and electron detection method
- 专利标题(中): 扫描带电粒子显微镜,图像采集方法和电子检测方法
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申请号: US14277948申请日: 2014-05-15
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公开(公告)号: US09275830B2公开(公告)日: 2016-03-01
- 发明人: Takeshi Otsuka
- 申请人: JEOL Ltd.
- 申请人地址: JP Tokyo
- 专利权人: JEOL Ltd.
- 当前专利权人: JEOL Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: The Webb Law Firm
- 优先权: JP2013-103301 20130515
- 主分类号: H01J37/22
- IPC分类号: H01J37/22 ; H01J37/28 ; H01J37/244
摘要:
A scanning charged particle microscope is offered which can selectively detect and image electrons. The scanning charged particle microscope (100) has: a source (1) of a charged particle beam (E1); an objective lens (6) for bringing the charged particle beam (E1) emitted from the source (1) into focus at a sample (S); a scanning deflector (4) for scanning the focused charged particle beam (E1) over the sample (S); a sorting portion (10) for sorting out electrons emitted at given emission angles from electrons released from the sample (S) in response to irradiation of the sample (S) by the charged particle beam (E1); an electron deflector (20) for producing a deflecting field to deflect the electrons (E2) sorted out according to their energy; a detection portion (30) for detecting the electrons (E2) deflected by the electron deflector (20); and an image creating portion (44) for creating an image, based on the results of the detection performed by the detection portion (30).
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