发明授权
US09275842B2 Multi-dopant permeation tube 有权
多掺杂剂渗透管

Multi-dopant permeation tube
摘要:
Aspects and embodiments of the present invention are directed to spectrometry systems and for apparatus and methods for delivering dopants to same. In one example, there is provided a dopant delivery device configured to supply dopants to a spectrometry system comprising a tube including a first chamber and a second chamber, a first dopant source included in the first chamber, and a second dopant source included in the second chamber.
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