发明授权
- 专利标题: Multi-dopant permeation tube
- 专利标题(中): 多掺杂剂渗透管
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申请号: US13698507申请日: 2012-05-22
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公开(公告)号: US09275842B2公开(公告)日: 2016-03-01
- 发明人: Timothy B. Burton , Stephen Scott Milt
- 申请人: Timothy B. Burton , Stephen Scott Milt
- 申请人地址: US MA North Andover
- 专利权人: DSA DETECTION LLC
- 当前专利权人: DSA DETECTION LLC
- 当前专利权人地址: US MA North Andover
- 代理机构: Lando & Anastasi, LLP
- 国际申请: PCT/US2012/038996 WO 20120522
- 国际公布: WO2012/166439 WO 20121206
- 主分类号: H01J49/00
- IPC分类号: H01J49/00 ; H01J49/04 ; G01N27/62
摘要:
Aspects and embodiments of the present invention are directed to spectrometry systems and for apparatus and methods for delivering dopants to same. In one example, there is provided a dopant delivery device configured to supply dopants to a spectrometry system comprising a tube including a first chamber and a second chamber, a first dopant source included in the first chamber, and a second dopant source included in the second chamber.
公开/授权文献
- US20130140455A1 MULTI-DOPANT PERMEATION TUBE 公开/授权日:2013-06-06
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