Invention Grant
US09275893B2 Method of detaching a layer 有权
分离层的方法

  • Patent Title: Method of detaching a layer
  • Patent Title (中): 分离层的方法
  • Application No.: US14426509
    Application Date: 2013-04-10
  • Publication No.: US09275893B2
    Publication Date: 2016-03-01
  • Inventor: Alexandre Barthelemy
  • Applicant: Soitec
  • Applicant Address: FR Bernin
  • Assignee: Soitec
  • Current Assignee: Soitec
  • Current Assignee Address: FR Bernin
  • Agency: TraskBritt
  • Priority: FR1202437 20120910
  • International Application: PCT/IB2013/000653 WO 20130410
  • International Announcement: WO2014/037769 WO 20140313
  • Main IPC: H01L21/762
  • IPC: H01L21/762
Method of detaching a layer
Abstract:
The present disclosure concerns a method of detaching a layer to be detached from a donor substrate, comprising the following steps: a) assembling the donor substrate and a porous substrate, b) application of a treatment of chemical modification of the crystallites, the chemical modification being adapted to generate a variation of the volume of the crystallites, the volume variation generates deformation in compression or in tension of the porous substrate, the deformation in compression or in tension generates a stress in tension or in compression in the donor substrate, which causes fracture in a fracture plane, the fracture plane delimiting the layer to be detached, the stress leading to the detachment of the layer to be detached from the donor substrate.
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