- 专利标题: Molecular self-assembly in substrate processing
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申请号: US14507328申请日: 2014-10-06
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公开(公告)号: US09275954B2公开(公告)日: 2016-03-01
- 发明人: Tony P. Chiang , Majid Keshavarz , David E. Lazovsky
- 申请人: Intermolecular, Inc.
- 申请人地址: US CA San Jose
- 专利权人: Intermolecular, Inc.
- 当前专利权人: Intermolecular, Inc.
- 当前专利权人地址: US CA San Jose
- 主分类号: H01L21/31
- IPC分类号: H01L21/31 ; H01L23/532 ; B82Y30/00 ; H01L21/768 ; H01L29/06 ; H01L49/02
摘要:
Methods for sealing a porous dielectric are presented including: receiving a substrate, the substrate including the porous dielectric; exposing the substrate to an organosilane, where the organosilane includes a hydrolysable group for facilitating attachment with the porous dielectric, and where the organosilane does not include an alkyl group; and forming a layer as a result of the exposing to seal the porous dielectric. In some embodiments, methods are presented where the organosilane includes: alkynyl groups, aryl groups, flouroalkyl groups, heteroarlyl groups, alcohol groups, thiol groups, amine groups, thiocarbamate groups, ester groups, ether groups, sulfide groups, and nitrile groups. In some embodiments, method further include: removing contamination from the porous dielectric and a conductive region of the substrate prior to the exposing; and removing contamination from the conductive region after the forming.
公开/授权文献
- US20150021774A1 Molecular Self-Assembly in Substrate Processing 公开/授权日:2015-01-22
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