Invention Grant
- Patent Title: Capacitors positioned at the device level in an integrated circuit product and methods of making such capacitors
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Application No.: US14598701Application Date: 2015-01-16
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Publication No.: US09275989B2Publication Date: 2016-03-01
- Inventor: Kok Yong Yiang , Patrick R. Justison
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L27/06
- IPC: H01L27/06 ; H01L29/66 ; H01L29/94 ; H01L27/08 ; H01L49/02

Abstract:
One illustrative integrated circuit product disclosed herein includes a metal-1 metallization layer positioned above a semiconducting substrate, a capacitor positioned between a surface of the substrate and a bottom of the metal-1 metallization layer, wherein the capacitor includes a plurality of conductive plates that are oriented in a direction that is substantially normal relative to the surface of the substrate, and at least one region of insulating material positioned between the plurality of conductive plates.
Public/Granted literature
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