Invention Grant
US09276006B1 Split gate non-volatile flash memory cell having metal-enhanced gates and method of making same
有权
具有金属增强栅的分闸非易失性闪存单元及其制造方法
- Patent Title: Split gate non-volatile flash memory cell having metal-enhanced gates and method of making same
- Patent Title (中): 具有金属增强栅的分闸非易失性闪存单元及其制造方法
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Application No.: US14589656Application Date: 2015-01-05
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Publication No.: US09276006B1Publication Date: 2016-03-01
- Inventor: Chun-Ming Chen , Man-Tang Wu , Jeng-Wei Yang , Chien-Sheng Su
- Applicant: Silicon Storage Technology, Inc.
- Applicant Address: US CA San Jose
- Assignee: Silicon Storage Technology, Inc.
- Current Assignee: Silicon Storage Technology, Inc.
- Current Assignee Address: US CA San Jose
- Agency: DLA Piper LLP (US)
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L21/28 ; H01L21/02 ; H01L29/45 ; H01L29/51 ; H01L29/49 ; H01L29/423 ; H01L29/788 ; H01L29/66

Abstract:
A non-volatile memory cell including a substrate having first and second regions with a channel region therebetween. A floating gate is disposed over and insulated from a first portion of the channel region which is adjacent the first region. A select gate is disposed over and insulated from a second portion of the channel region which is adjacent to the second region. The select gate includes a block of polysilicon material and a work function metal material layer extending along bottom and side surfaces of the polysilicon material block. The select gate is insulated from the second portion of the channel region by a silicon dioxide layer and a high K insulating material layer. A control gate is disposed over and insulated from the floating gate, and an erase gate is disposed over and insulated from the first region, and disposed laterally adjacent to and insulated from the floating gate.
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