发明授权
- 专利标题: Three dimensional RRAM device, and methods of making same
- 专利标题(中): 三维RRAM设备及其制作方法
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申请号: US13423793申请日: 2012-03-19
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公开(公告)号: US09276041B2公开(公告)日: 2016-03-01
- 发明人: Eng Huat Toh , Elgin Quek , Shyue Seng Tan
- 申请人: Eng Huat Toh , Elgin Quek , Shyue Seng Tan
- 申请人地址: SG Singapore
- 专利权人: GLOBALFOUNDRIES Singapore PTE LTD
- 当前专利权人: GLOBALFOUNDRIES Singapore PTE LTD
- 当前专利权人地址: SG Singapore
- 代理机构: Amerson Law Firm, PLLC
- 主分类号: H01L47/00
- IPC分类号: H01L47/00 ; H01L27/24 ; H01L45/00
摘要:
Disclosed herein are various embodiments of novel three dimensional RRAM devices, and various methods of making such devices. In one example, a device disclosed herein includes a first electrode for a first bit line comprising a variable resistance material, a second electrode for a second bit line comprising a variable resistance material and a third electrode positioned between the variable resistance material of the first bit line and the variable resistance material of the second bit line.
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