发明授权
- 专利标题: Manufacturing design and processing methods and apparatus for sputtering targets
- 专利标题(中): 溅射靶的制造设计及加工方法及装置
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申请号: US12109816申请日: 2008-04-25
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公开(公告)号: US09279178B2公开(公告)日: 2016-03-08
- 发明人: Janine K. Kardokus , Michael Pinter , Michael D. Payton , Steven (Chi Tse) Wu , Jared Akins , Werner Hort
- 申请人: Janine K. Kardokus , Michael Pinter , Michael D. Payton , Steven (Chi Tse) Wu , Jared Akins , Werner Hort
- 申请人地址: US NJ Morris Plains
- 专利权人: Honeywell International Inc.
- 当前专利权人: Honeywell International Inc.
- 当前专利权人地址: US NJ Morris Plains
- 代理机构: Faegre Baker Daniels LLP
- 主分类号: C22F1/00
- IPC分类号: C22F1/00 ; C23C14/34 ; C22F1/18
摘要:
Sputtering targets having a reduced burn-in time are disclosed that comprise: a) a heat-modified surface material having a substantially uniform crystallographic orientation, wherein at least part of the surface material was melted during heat-treatment, and b) a core material having an average grain size. Sputtering targets are also disclosed that include a heat-modified surface material having network of shallow trenches, alternating rounded peaks and valleys in the surface of the target or a combination thereof, wherein at least part of the surface material was melted during heat-treatment, and a core material having an average grain size. Methods of producing sputtering targets having reduced burn-in times comprises: a) providing a sputtering target comprising a sputtering surface having a sputter material and a crystal lattice, and b) heat-modifying the sputtering surface in order to melt at least part of the surface material and modify the crystal lattice. Methods of producing a sputtering target having a reduced burn-in time are also disclosed comprising: providing a sputtering target having a sputtering surface, wherein the sputtering surface comprises a damage layer, and modifying the sputtering surface by deplating a layer of material, pulsed-plating a layer of material or a combination thereof.
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