Invention Grant
US09280056B2 Method and system for printing high-resolution periodic patterns 有权
打印高分辨率周期图案的方法和系统

  • Patent Title: Method and system for printing high-resolution periodic patterns
  • Patent Title (中): 打印高分辨率周期图案的方法和系统
  • Application No.: US13979489
    Application Date: 2012-01-10
  • Publication No.: US09280056B2
    Publication Date: 2016-03-08
  • Inventor: Francis ClubeHarun Solak
  • Applicant: Francis ClubeHarun Solak
  • Applicant Address: CH Villigen/PSI
  • Assignee: EULITHA A.G.
  • Current Assignee: EULITHA A.G.
  • Current Assignee Address: CH Villigen/PSI
  • Agent Laurence Greenberg; Werner Stemer; Ralph Locher
  • International Application: PCT/IB2012/050128 WO 20120110
  • International Announcement: WO2012/095795 WO 20120719
  • Main IPC: G03F7/20
  • IPC: G03F7/20
Method and system for printing high-resolution periodic patterns
Abstract:
A method for printing a desired periodic pattern includes providing a mask bearing a pattern of features having a period, providing a substrate bearing a photosensitive layer, arranging the substrate with a separation from the mask, generating collimated light with a wavelength and an intensity, at least the former of which may be temporally varied to deliver a spectral distribution of energy density, illuminating the mask pattern with the light while varying at least its wavelength so as to deliver a spectral distribution of energy density, such that the light-field transmitted by the mask is instantaneously composed of a range of transversal intensity distributions between Talbot planes. The layer is exposed to a time-integrated intensity distribution that prints the desired pattern. The separation, spectral distribution and period are arranged so that the time-integrated intensity distribution corresponds to an average of the range of transversal intensity distributions.
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