- 专利标题： Performing OPC on hardware or software platforms with GPU
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申请号： US14137656申请日： 2013-12-20
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公开(公告)号： US09280631B2公开(公告)日： 2016-03-08
- 发明人: Ilhami H. Torunoglu , Ahmet Karakas
- 申请人： Gauda, Inc.
- 申请人地址： US CA San Jose
- 专利权人： D2S, Inc.
- 当前专利权人： D2S, Inc.
- 当前专利权人地址： US CA San Jose
- 代理机构： The Mueller Law Office, P.C.
- 主分类号： G06F17/50
- IPC分类号： G06F17/50 ; G03F1/00 ; G03F1/36
摘要：
Optical proximity correction techniques performed on one or more graphics processors improve the masks used for the printing of microelectronic circuit designs. Execution of OPC techniques on hardware or software platforms utilizing graphics processing units. GPUs may share the computation load with the system CPUs to efficiently and effectively execute the OPC method steps.
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